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Series sputtering ion pump

Shenyang Keyi has rich experience in the vacuum industry. As early as 1990, it has successfully developed a three-stage sputtering ion pump with a maximum vacuum of -9Pa. After more than 20 years of intensive research and development, we have continuously added new design concepts and technologies to it. In 2014 we launched a new generation of composite secondary sputtering ion pumps.

The new generation of sputtering ion pump produced by Shenyang Keyi can obtain extremely high vacuum. Compared with similar foreign products, it has lower ultimate pressure, smaller volume and lighter weight. It is suitable for pumping air or inert gas without vibration during pumping. The current pumping speed range of the product series is 10L / S—1000L / S, and customized products can also be provided according to customer requirements.

Sputtering ion pump

Ion pump power

Ion pump test report

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