Single-chamber vertical structure high-vacuum coating equipment can be used to develop single-layer film-diamond-like film (DLC). Diamond-like carbon film has the advantages of high infrared spectral transmittance, high hardness, small friction coefficient, and good chemical stability. Antioxidant effect. Applicable to military and optical lens manufacturers for mass production of infrared lenses.
It is mainly composed of coating room, target electrode, radio frequency power supply, electromagnetic coil and control power supply, pumping system, vacuum measurement system, electrical control system, gas system, water system, etc.