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L-type MBE-400 molecular beam epitaxial growth equipment
Number: SN20151013153841637
Category: Evaporation Coating Equipment
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    Equipment use

    It is used for the preparation of nano-scale single-layer and multi-layer functional films, hard films, metal films, semiconductor films, dielectric films and other new thin-film materials. It can be widely used in scientific research and small batch preparation of thin film materials in universities and research institutes.

    Equipment composition

    The system is mainly composed of an epitaxial growth chamber, a preparation chamber, a rapid sampling system (sampling chamber), a vacuum acquisition system, a sampling system, a transmission guide, a high-energy electron diffraction system, an electrical control system, and a computer control system.

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