It is used for the research of thin film solar cells, EL OEL molecular organic electroluminescent device films. It is widely used in scientific research and small batch preparation of thin film materials in universities and research institutes.
The system adopts a linear structure, which is mainly composed of two organic material growth chambers. The two organic material growth chambers are connected by a gate valve. One of the growth chamber systems reserves a docking interface with the glove box, which can complete two sets of independent Substrates are prepared for transfer between thin film systems. The organic material growth chamber is mainly composed of a vacuum chamber cavity component, an organic evaporation source, a thermal resistance evaporation boat, a sample transfer device, a sample stage, a film thickness monitor, a vacuum chamber lighting device, and a baking device.